Научная
деятельность
Университет ИТМО

Меню

Публикации

1. Skvortsov A.M., Veiko V.P., Huynh C.T., Khaletskiy R.A. Microstructuring system SiO2/Si with nanosecond pulsed fiber laser // Proceedings of SPIE - 2013, Vol. 9065, pp. 90650-1–9065-5


2. Polyakov D.S., Skvortsov A.M., Veiko V.P. Influence of Pulsed Fiber Laser Radiation on Surface Morphology and Electrical Properties of Si/SiO2 Structure // Journal of Laser Micro Nanoengineering - 2015, Vol. 10, No. 3, pp. 269-273


3. Veiko V.P., Skvortsov A.M., Huynh C.T., Petrov A.A. Laser ablation of single-crystalline silicon by radiation of pulsed frequency-selective fiber laser // Technical Physics Letters - 2015, Vol. 41, No. 7, pp. 701-704